GENESIS ALD series

GENESIS ALD Series

World’s only commercially available roll-to-roll ALD system

MARKETS AND APPLICATIONS

Functional ALD coatings for batteries, solar, and flexible electronics. The Genesis ALD is ideal for coating any roll-format substrates, and for multiple functional applications.

  • Passivation of cathodes and anodes for various types of lithium-ion and solid-state batteries
  • Conductive layers and encapsulation for flexible solar cells
  • Moisture barriers for flexible electronics
MATERIAL SELECTION

Wide selection of ALD materials to meet your requirement. For years Beneq has pioneered roll-to-roll ALD systems for R&D and industrial production. Our common materials include Al2O3, TiO2, SiO2, ZnO, Zn(O,S) or any other material on request.

FEATURE HIGHLIGHTS
  • Web width: max. 420mm
  • ALD coating thickness: max. 100nm
  • Dynamic deposition rate (Al2O3): 10 nm *m/min
  • Process temperature: max. 250°C
CUSTOMISATION

At maximum 420mm web width, the Genesis ALD is suitable for lab R&D or pilot scale production. Designed to handle ALD films onto flexible substrates such as polymer or metal. Working with our partner E+R Group, the leading roll-to-roll vacuum coater company, we offer customers optional designs for wider webs and line integration.
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Technical Specifications

Machine Speed
Production Minimum 0.1 mpm
Production Maximum 10 mpm
Web Material
Copper, Aluminum, Stainless steel,
polymer, paper and other substrates
suitable for vacuum coating
Incoming Reel
Web Width Maximum 420 mm
Web Width Minimum 100 mm
Diameter Maximum 300 mm
Core ID 152 mm
Interleave winders Yes
Interleave diameter maximum 150 mm
ALD Materials
Al2O3, TiO2, ZnO, ZnS, SiO2 and more
Maximum Temperature
250 ºC